THz Technology

A wave with a frequency of 1 Terahertz has a wavelength of 300 micrometer in free space. Consequently structure sizes of THz applications are at the same order of magnitude – mostly even smaller. For this purpose, a technology is required, which enables the precise particle-free and highly resolved fabrication of such devices.

A cleanroom of class ISO 5 offers i.a. the following possibilities for microfabrication:

  • Structuring (optical lithography, electron- and ion-beam-lithographie)

  • Coating processes (Sputtering, Evaporation)

  • Chemical analysis and cleaning

  • Structural analysis (Profilometer, EDX)

  • Microscopy (optical microscopy, STM, SEM, AFM)


WiPLASH Project

The main design principles in computer architecture have shifted from a monolithic scaling-driven approach towards an emergence of heterogeneous architectures that tightly co-integrate multiple specialized computing and memory units.

Quelle: project page


We are very happy to announce that a video for the WiPLASH project is now available on YoutTube:

WiPLASH: Wireless Plasticity for Massive Heterogeneous Computer Architectures

Completed Projects


Such processes are needed as part of the TUGRACO (Towards Ubiquitous GRAphene based RF COmmunications) project, where metallic as well as graphene-based micro-antennas are used.

Project Page